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Microprobe-Based Cd Measurement Tool

IP.com Disclosure Number: IPCOM000037279D
Original Publication Date: 1989-Dec-01
Included in the Prior Art Database: 2005-Jan-29

Publishing Venue

IBM

Related People

Authors:
Nyyssonen, D [+details]

Abstract

Disclosed is the design of a metrology tool which utilizes the atomic force microprobe (AFM) [1] as a surface sensor and is specifically designed for measuring trench depth and width at micrometer and smaller dimensions at approximately 1:1 and higher aspect ratios.