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Method to Compute the Random Photo Yield of Integrated Circuits Disclosure Number: IPCOM000037312D
Original Publication Date: 1989-Dec-01
Included in the Prior Art Database: 2005-Jan-29

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Guedj, D Rivier, M [+details]


The random photo yield represents in actual circuits a major portion of the yield detractors (>70% of faults for mature process) in chip manufacturing. It is therefore important to be able to compute accurately random yield of existing and future products.