Browse Prior Art Database

Method to Compute the Random Photo Yield of Integrated Circuits

IP.com Disclosure Number: IPCOM000037312D
Original Publication Date: 1989-Dec-01
Included in the Prior Art Database: 2005-Jan-29

Publishing Venue

IBM

Related People

Authors:
Guedj, D Rivier, M [+details]

Abstract

The random photo yield represents in actual circuits a major portion of the yield detractors (>70% of faults for mature process) in chip manufacturing. It is therefore important to be able to compute accurately random yield of existing and future products.