Browse Prior Art Database

Laser Development of Latent Images

IP.com Disclosure Number: IPCOM000037322D
Original Publication Date: 1989-Dec-01
Included in the Prior Art Database: 2005-Jan-29

Publishing Venue

IBM

Related People

Authors:
Kreuter, V Tam, A Zapka, W [+details]

Abstract

This article describes a dry development process for lithographically produced latent images in a photoresist layer. This process comprises a silylation step which changes the optical properties of the unexposed regions, and a suitable laser floodlight exposure step.