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Laser Development of Latent Images Disclosure Number: IPCOM000037322D
Original Publication Date: 1989-Dec-01
Included in the Prior Art Database: 2005-Jan-29

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Kreuter, V Tam, A Zapka, W [+details]


This article describes a dry development process for lithographically produced latent images in a photoresist layer. This process comprises a silylation step which changes the optical properties of the unexposed regions, and a suitable laser floodlight exposure step.