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Black-Hole Reflective Mask Disclosure Number: IPCOM000037345D
Original Publication Date: 1989-Dec-01
Included in the Prior Art Database: 2005-Jan-29

Publishing Venue


Related People

Hibbs, MS Lin, BJ Mohler, RL Nesbit, LA [+details]


Reflective optical masks, which may be used in the fabrication of semiconductor chips, can use geometric light traps or "black holes" for the non-reflective part of a reflective mask.