Browse Prior Art Database

Black-Hole Reflective Mask

IP.com Disclosure Number: IPCOM000037345D
Original Publication Date: 1989-Dec-01
Included in the Prior Art Database: 2005-Jan-29

Publishing Venue

IBM

Related People

Authors:
Hibbs, MS Lin, BJ Mohler, RL Nesbit, LA [+details]

Abstract

Reflective optical masks, which may be used in the fabrication of semiconductor chips, can use geometric light traps or "black holes" for the non-reflective part of a reflective mask.