Browse Prior Art Database

Simplified Automated Wafer Orientor and Notch Finder

IP.com Disclosure Number: IPCOM000037361D
Original Publication Date: 1989-Dec-01
Included in the Prior Art Database: 2005-Jan-29

Publishing Venue

IBM

Related People

Authors:
Bancroft, CE Lisanke, MG Seing, HS Stermer, TW Sullivan, JL [+details]

Abstract

This article describes an orientor mechanism to rapidly center a wafer and then locate its notch.