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Multiple Target Configuration for Ion Beam Deposition

IP.com Disclosure Number: IPCOM000037389D
Original Publication Date: 1989-Dec-01
Included in the Prior Art Database: 2005-Jan-29

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Related People

Kim, J Souk, JH [+details]


Disclosed is a device to accommodate a larger number of sputtering targets and to access any combinations of these targets in an ion beam system.