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Reduced Polysilicon Wiring Capacitance

IP.com Disclosure Number: IPCOM000037532D
Original Publication Date: 1989-Mar-01
Included in the Prior Art Database: 2005-Jan-29

Publishing Venue

IBM

Related People

Authors:
El-Kareh, B Puttlitz, AF [+details]

Abstract

A method to reduce the polysilicon wiring capacitance in CMOS structuresis described.