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Double High Dielectric Capacitor

IP.com Disclosure Number: IPCOM000037539D
Original Publication Date: 1989-Mar-01
Included in the Prior Art Database: 2005-Jan-29

Publishing Venue

IBM

Related People

Authors:
Leas, JM [+details]

Abstract

A microelectronic capacitor fabrication process is shown which produces low defect density and high dielectric constant capacitors.