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Measured Mirror Laser's Beam Adjustment

IP.com Disclosure Number: IPCOM000037547D
Original Publication Date: 1989-Mar-01
Included in the Prior Art Database: 2005-Jan-29

Publishing Venue

IBM

Related People

Authors:
Balas, R [+details]

Abstract

This article describes a simple and effective method of adjusting a laser mirror 11 to align a laser beam 13 from a gas laser 15 with the wafer serial number (not pictured) in a wafer serial reader. It avoids the lengthy trial and error method of the prior art.