Negative Bias Masking Using Laser Endpoint Developing
Original Publication Date: 1989-Mar-01
Included in the Prior Art Database: 2005-Jan-29
A difficulty encountered in optical lithography is the ability to repeatably reproduce images of varying sizes to zero print bias. A different print bias is typically seen between images of large and small size as well as for images in isolated versus evenly spaced pitches. A technique is disclosed herein which can minimize the bias variation seen in typical lithographic processing.