Browse Prior Art Database

Elimination of Sag During Exposure of Glass Masters

IP.com Disclosure Number: IPCOM000037606D
Original Publication Date: 1989-Apr-01
Included in the Prior Art Database: 2005-Jan-29

Publishing Venue

IBM

Related People

Authors:
Japp, RM Shaver, NL [+details]

Abstract

Gravitational sag of edge-supported glass master can be eliminated by using an air pressure differential across the master to enable closer undistorted proximity exposure during circuitization processing.