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Elimination of Sag During Exposure of Glass Masters Disclosure Number: IPCOM000037606D
Original Publication Date: 1989-Apr-01
Included in the Prior Art Database: 2005-Jan-29

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Japp, RM Shaver, NL [+details]


Gravitational sag of edge-supported glass master can be eliminated by using an air pressure differential across the master to enable closer undistorted proximity exposure during circuitization processing.