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Quartz Sputter System Brass Electrode

IP.com Disclosure Number: IPCOM000037615D
Original Publication Date: 1989-Apr-01
Included in the Prior Art Database: 2005-Jan-29

Publishing Venue

IBM

Related People

Authors:
Lupul, FT York, MD Zehnbauer, VW [+details]

Abstract

Some commercial quartz sputter systems in production have copper anodes and cathodes for electrodes. The electrodes may deviate from a flatness specification after many cycles of operation. This condition of poor point-to-point contact between the anode and anode plate induces temperature and uniformity of glass coverage problems.