Quartz Sputter System Brass Electrode
Original Publication Date: 1989-Apr-01
Included in the Prior Art Database: 2005-Jan-29
Some commercial quartz sputter systems in production have copper anodes and cathodes for electrodes. The electrodes may deviate from a flatness specification after many cycles of operation. This condition of poor point-to-point contact between the anode and anode plate induces temperature and uniformity of glass coverage problems.