Enhanced Dry Stripping Process of Drill Smear in Multi-Layer Laminants
Original Publication Date: 1989-May-01
Included in the Prior Art Database: 2005-Jan-29
Disclosed is a method for enhanced etch speed and improved uniformity of etch in multi-layer laminants with formed through holes. This is accomplished as follows: (See Fig. 1). Panels are placed in a dry process chamber, preferably with RIE or microwave capability. A negative bias is applied to the internal ground and voltage planes in the laminated structure. This procedure forms a bias within each hole, especially toward the center of the specific hole. Application of bias to the panel can be accomplished through the addition of a test stud at the edge of each panel.