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Multi-Station Load And Unload System Disclosure Number: IPCOM000037677D
Original Publication Date: 1989-May-01
Included in the Prior Art Database: 2005-Jan-29

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Related People

Schick, HC Collins, D [+details]


This article describes a multi-cassette loading and unloading unit (system unit) that is designed to provide wafer processing stations having single cassette capability with the capability to process a plurality of cassette, without human intervention.