Browse Prior Art Database

Multi-Station Load And Unload System

IP.com Disclosure Number: IPCOM000037677D
Original Publication Date: 1989-May-01
Included in the Prior Art Database: 2005-Jan-29

Publishing Venue

IBM

Related People

Authors:
Schick, HC Collins, D [+details]

Abstract

This article describes a multi-cassette loading and unloading unit (system unit) that is designed to provide wafer processing stations having single cassette capability with the capability to process a plurality of cassette, without human intervention.