Browse Prior Art Database

Visual Reference Monitoring System Processes

IP.com Disclosure Number: IPCOM000037732D
Original Publication Date: 1989-Jun-01
Included in the Prior Art Database: 2005-Jan-29

Publishing Venue

IBM

Related People

Authors:
Mlynko, WE Susko, RH [+details]

Abstract

For a process monitor, this system proposes the use of a chemical/visual reflectance test to provide a visual method for monitoring the overall effectiveness and uniformity of the plasma edge (expose) operation.