Etch Suppressor for Electromagnetic Radiation Etching of Polymers
Original Publication Date: 1989-Jun-01
Included in the Prior Art Database: 2005-Jan-30
Etch rate of a polymer, e.g. polyimide, by electromagnetic radiation, e.g. laser light, is suppressed by roughening the polymer surface. The incident radiation slowly etches through the roughened surface layer and then etches the bulk polymer at the etch rate for the unroughened polymer. The roughened surface is useful as a polymer etch stop.