Tungsten Alignment Marks for Electron Beam Lithography
Original Publication Date: 1989-Jun-01
Included in the Prior Art Database: 2005-Jan-30
Disclosed is a technique by which electron beam alignment marks are fabricated in planar integrated circuit structures. These alignment marks (Fig. 1) allow registration of electron beam defined patterns on planar dielectric and low-Z metal films without the need to selectively remove these films over the alignment mark area.