Semiconductor Yield Management System
Original Publication Date: 1989-Jul-01
Included in the Prior Art Database: 2005-Jan-30
By automating in-process, non-destructive semiconductor device and wafer inspection, cataloging and analyzing inspection data, and relating the data to yield models; fast yield prediction and process control is achieved. A total manufacturing yield management system comprised of six interconnected measurement, assessment, and feedback control subsystems is described.