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Fine movements associated with electrically probing small geometries by utilizing a constant flow variable speed micro positioner is discussed in this article.
English (United States)
This text was extracted from a PDF file.
This is the abbreviated version, containing approximately
85% of the total text.
Page 1 of 1
Liquid Probe Drive for Electrical Probing
Fine movements associated with electrically probing small geometries by
utilizing a constant flow variable speed micro positioner is discussed in this
With ever decreasing geometries of semiconductor devices associated with
large scale integrated circuits, failure analysis testing must be able to verify
circuit designs and operation. To do this efficiently, analysts must be assured a
good and continuous contact with the circuit/device under test. Typically, when
using electrical probes, the resolution of a mechanical screw drive is too course
or has a significant amount of resistance which makes probing difficult. Also,
constant repositioning can cause damage to a device. To overcome the
problems of probe position resolution, a constant flow, variable speed micro
positioner is shown in the figure.
A cylinder containing two liquid filled bags, a thumb screw controlling the
opening in an aperture, a vacuum/air pressure port, a vent and a piston
controlling a probe arm are the primary components of the liquid probe
mechanism. The liquid contained in the two flexible bags is allowed to flow
between the bags through a variable aperture when pressure or vacuum is
applied. The expansion and contraction of the bag associated with the piston
causes the probe arm to move in or out. After a vacuum or pressure is applied
through the port, the aperture is opened to allow progressively faster movement
until the probe is on the...