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Liquid Probe Drive for Electrical Probing

IP.com Disclosure Number: IPCOM000037876D
Original Publication Date: 1989-Aug-01
Included in the Prior Art Database: 2005-Jan-30

Publishing Venue

IBM

Related People

Authors:
Coutu, PT [+details]

Abstract

Fine movements associated with electrically probing small geometries by utilizing a constant flow variable speed micro positioner is discussed in this article.