Browse Prior Art Database

Emulation to Eliminate Character of a Maskmaking Tool

IP.com Disclosure Number: IPCOM000037889D
Original Publication Date: 1989-Aug-01
Included in the Prior Art Database: 2005-Jan-30

Publishing Venue

IBM

Related People

Authors:
Weber, EV [+details]

Abstract

This technique uses software to provide a rapid correction of actual table position in semiconductor maskmaking tools to match a master grid. The system table would emulate either a nominally perfect master or the distortion of another system.