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Emulation to Eliminate Character of a Maskmaking Tool Disclosure Number: IPCOM000037889D
Original Publication Date: 1989-Aug-01
Included in the Prior Art Database: 2005-Jan-30

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Related People

Weber, EV [+details]


This technique uses software to provide a rapid correction of actual table position in semiconductor maskmaking tools to match a master grid. The system table would emulate either a nominally perfect master or the distortion of another system.