Browse Prior Art Database

Automated Space Alignment Device Disclosure Number: IPCOM000037892D
Original Publication Date: 1989-Aug-01
Included in the Prior Art Database: 2005-Jan-30

Publishing Venue


Related People

Lee, WT [+details]


An automated space alignment device has been developed for handling semiconductor wafers. A pickup positional locator is used to relay the home positional signal to the main tool computer which has been programmed to recalibrate all stop positions for wafer pickup.