Browse Prior Art Database

Automated Space Alignment Device

IP.com Disclosure Number: IPCOM000037892D
Original Publication Date: 1989-Aug-01
Included in the Prior Art Database: 2005-Jan-30

Publishing Venue

IBM

Related People

Authors:
Lee, WT [+details]

Abstract

An automated space alignment device has been developed for handling semiconductor wafers. A pickup positional locator is used to relay the home positional signal to the main tool computer which has been programmed to recalibrate all stop positions for wafer pickup.