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Ionizable Gas Device Compatible with Integrated Circuit Device Size and Processing Disclosure Number: IPCOM000037945D
Original Publication Date: 1989-Sep-01
Included in the Prior Art Database: 2005-Jan-31

Publishing Venue


Related People

Cronin, JE Kaanta, CW Potter, MD [+details]


Devices using ionization of gas, e.g., noble gas light emitters, are made with processing techniques developed for manufacture of integrated circuits. Thus, ionizable gas devices may be made very small and can be incorporated into semiconductor device circuits.