Browse Prior Art Database

Copper Cleaning And Treatment Solution

IP.com Disclosure Number: IPCOM000037988D
Original Publication Date: 1989-Sep-01
Included in the Prior Art Database: 2005-Jan-31

Publishing Venue

IBM

Related People

Authors:
Atkinson, JM Bendz, D Bindra, P Edwards, R [+details]

Abstract

Disclosed is the formulation of a copper cleaning and treatment solution effective in removing organic residue and oxide from the surface of copper prior to electroless or electrolytic plating. This formulation is particularly useful for thin base copper layers (e.g., sputtered copper films, 5 micron copper foil) and pattern plating applications.