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Condensible Vapor Delivery Vessel Disclosure Number: IPCOM000038000D
Original Publication Date: 1989-Sep-01
Included in the Prior Art Database: 2005-Jan-31

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Edmonson, DA Kruger, BP [+details]


Addition of reactive dopants to noble processing gasses is becoming more common as practitioners attempt to customize thin film properties. Most often these dopants are chosen in gaseous from so as to be easily mixed using commercially available hardware. In certain instances it is desired to use chemicals that are normally liquids. For these compounds it is difficult to maintain a steady flow into a mixing manifold using only the vapor pressure of the substance as a backing pressure. The apparatus described below can be used to mix condensible vapors directly into a carrier gas over a range from .01% to > 5% depending on the vapor pressure of the liquid. (Image Omitted)