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Laser Patterning of Superconducting Oxide Films

IP.com Disclosure Number: IPCOM000038151D
Original Publication Date: 1989-Nov-01
Included in the Prior Art Database: 2005-Jan-31

Publishing Venue

IBM

Related People

Authors:
Hodgson, RT [+details]

Abstract

Disclosed is a method of making patterns in superconducting oxide films. A single pulse of laser light at 308 nm turns the oxide film from a superconductor to an insulator, so that a pattern can be projected onto the film to make, for example, a SQUID magnetic field monitor. The amount of fluence required (200 mj/cm2) is quite small compared to the fluence used to ablate polymers, and such fluences can easily be handled by metal masks or by dielectric masks.