Sacrificial Material for Planarization
Original Publication Date: 1989-Dec-01
Included in the Prior Art Database: 2005-Jan-31
To avoid high temperature processing or processing in more than one tool, a sacrificial material having a low melting point, e.g. boron oxide (B2O3), is deposited in a tool having both chemical vapor deposition (CVD) and reactive ion etching (RIE) processes available within a controlled environment.