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Two Layer Film Thickness Measurement

IP.com Disclosure Number: IPCOM000038175D
Original Publication Date: 1989-Dec-01
Included in the Prior Art Database: 2005-Jan-31

Publishing Venue

IBM

Related People

Authors:
Rogers, JL [+details]

Abstract

By adding new criteria for goodness of fit between calculated and measured spectral reflectance, an instrument used to make thickness measurements of single layers of transparent films can be used to measure thickness of each of two overlayed transparent films.