Polymer Sidewall Image Transfer
Original Publication Date: 1989-Dec-01
Included in the Prior Art Database: 2005-Jan-31
Certain polymers which have been exposed to light create a phenolic OH group and react to an organometallic vapor, e.g. hexamethyldisylazane (HMDS), to become resistant to etching in an oxygen plasma. By varying time and temperature of HMDS exposure, only an edge region of the exposed area of the polymer becomes resistant to etching. Thus, a polymer sidewall image which is smaller than can be defined by lithographic mask design remains after an oxygen plasma development process.