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A Sensitive Capacitance Measurement for Semiconductor Device

IP.com Disclosure Number: IPCOM000038188D
Original Publication Date: 1989-Dec-01
Included in the Prior Art Database: 2005-Jan-31

Publishing Venue

IBM

Related People

Authors:
Hwang, TT [+details]

Abstract

Disclosed is a technique to measure physical semiconductor device capacitance accurately. The technique enables one to measure capacitance in femto (10-15) Farad resolution.