Browse Prior Art Database

Edge Alignment and Edge Vernier Alignment Mark for Thin Film Head Fabrication

IP.com Disclosure Number: IPCOM000038217D
Original Publication Date: 1989-Dec-01
Included in the Prior Art Database: 2005-Jan-31

Publishing Venue

IBM

Related People

Authors:
Chen, MM Ju, K Lee, R Santini, H Tsang, C [+details]

Abstract

Disclosed is an edge alignment mark design to improve the alignment accuracy for devices where the edge-to-edge alignment between levels is critical.