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Edge Alignment and Edge Vernier Alignment Mark for Thin Film Head Fabrication Disclosure Number: IPCOM000038217D
Original Publication Date: 1989-Dec-01
Included in the Prior Art Database: 2005-Jan-31

Publishing Venue


Related People

Chen, MM Ju, K Lee, R Santini, H Tsang, C [+details]


Disclosed is an edge alignment mark design to improve the alignment accuracy for devices where the edge-to-edge alignment between levels is critical.