In-Process Protection Layer for Magnetoresistive Sensor
Original Publication Date: 1989-Dec-01
Included in the Prior Art Database: 2005-Jan-31
Disclosed is a material of TiW or NiCrOx to be used as a protection layer for thin NiFe magnetostrictive sensor. The protection layer is needed to prevent the degradation in magnetic properties caused by the elevated temperature treatment in air during the fabrication of the magnetoresistive sensor.