Magnetic Guiding Fields in an Electron Spectrometer for Laser-Testing
Original Publication Date: 1987-Jan-01
Included in the Prior Art Database: 2005-Jan-31
This article suggests a method for integrated circuit chip testing using laser-excited photoemission. The photoelectrons emitted from the tested structure are deflected by a homogeneous magnetic field in a semicircular path to a detector which is arranged at the side of the chip. If necessary, an electrostatic focussing field is additionally provided for focussing the electrons on the desired detector target. A laser testing scheme has been proposed which allows testing of the dynamic operation and performance of high-speed VLSI circuits, including on-chip, contactless measurement of AC switching waveforms (picosecond time scales). This technique achieves high time, lateral, and voltage resolution.