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Cleanroom Materials Particulate Generator and Test Chamber

IP.com Disclosure Number: IPCOM000038383D
Original Publication Date: 1987-Jan-01
Included in the Prior Art Database: 2005-Jan-31

Publishing Venue

IBM

Related People

Authors:
Charnetsky, RH Fein, M Smith, JC [+details]

Abstract

Because all materials generate varying amounts of particulates, the selection of materials to be used in a cleanroom environment is critical. A method of sampling and evaluating materials for particle- and fiber-generating properties works as follows in a described test chamber. As seen in the drawing (a side view), the test chamber generates and analyzes sample fabric and material contamination levels. The material sample 1 is contained within a clean chamber 2 where the sample 1 is repeatedly flexed by a neoprene membrane 3 to generate debris. The membrane 3 is flexed by a variable flow of compressed gas from compression chamber 4, which is injected into a deflection core 5 to drive membrane 3 against sample 1, causing debris. Debris is entrained into an airstream, represented by the arrows seen in the drawing.