Compliant End-Of-Arm Robot Tooling for Wafer/Backer Handling
Original Publication Date: 1987-Jan-01
Included in the Prior Art Database: 2005-Jan-31
A technique is described whereby compliant end-of-arm robot tooling provides accurate handling of a wafer or backer in clean room environments. The tooling allows for axial and angular offsets not normally recognized by robotic vision systems. The end-of-arm compliance tooling is intended to be operational in a class 100 clean room environment. It is designed to be attached to a robot arm so as to facilitate the positioning of wafers into nest holes of a stainless steel dome. A disk or backer is then placed on top of the wafer to act as a clamp and heat sink. The dome is then exposed to sputtering which deposits layers of metal onto the wafers. In prior art, the robotic vision system provided only two-dimensional positioning.