GaAs SURFACES FOR METAL CONTACTS
Original Publication Date: 1987-Jan-01
Included in the Prior Art Database: 2005-Jan-31
The surface of GaAs can be passivated so that it will not degrade in air within an acceptable processing period by first immersing in 50% HCl which removes the oxide, and then adding AuCl which produces about a 100 ˜ layer of Au on the oxide-free GaAs surface. The Au layer becomes part of an Au-Ge-Ni metallurgy contact and serves to passivate the surface of the GaAs in air during the processing period required until the next processing step, such as transfer to a vacuum system.