Xyz Travelling Support
Original Publication Date: 1987-Jan-01
Included in the Prior Art Database: 2005-Jan-31
This support is useful for displacing an object, or a tool, in horizontal and vertical directions with steps in the nanometer range. The support employs the well-known double-wedge principle: When two wedges are moved against one another, the upper wedge (1) climbs on the back of the lower (2). Here, the lower wedge is divided into two parts 2a and 2b, the parts being interconnected by a piezoelectric element 3. Each one of the parts 2a, 2b rests with three feet F on a metallic base plate 4. Each foot F comprises a sphere 5 resting in a conical hole in its associated wedge, and an anodized aluminium disk 6 likewise having a conical hole. The isolating oxide layer on their lower surface allows the feet to be electrostatically clamped to base plate 4.