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Quartz Paddle to Be Used in Diffusion Furnaces

IP.com Disclosure Number: IPCOM000038875D
Original Publication Date: 1987-Mar-01
Included in the Prior Art Database: 2005-Feb-01

Publishing Venue

IBM

Related People

Authors:
Deseez, C Mathieu, M Mazurais, B [+details]

Abstract

Use of this paddle is recommended for depositing POC13 and BBr3 as well as oxidizing in a chlorinated atmosphere. The operating temperatures should not exceed 1000oC. Due to its profile, this paddle has only small effects on the gas flow and allows the surface resistance gradients to be reduced by a factor of 2, in particular on the deposits. Advantages - The tube can be readily and perfectly sealed. - It does not need any additional mechanical systems of the state of the art which are known to be sophisticated in their design, expensive and which require excessive maintenance. - This paddle can be installed in all ovens without any modification of the equipment. - It improves the process reproducibility. - It reduces glass breakage.