Quartzware to Reduce Particulate Contamination
Original Publication Date: 1987-Mar-01
Included in the Prior Art Database: 2005-Feb-01
Due to the increasing integration performed in the semiconductor industry and the reduction of the dimensions in the photo-engraving domain, the particular contamination brought by the hot processes becomes more and more important. This contamination is mainly due to the friction of the boats against the quartz tubes used in hot processing. It appears that it would be very easy to cancel this friction by using "cantilever" systems. However, the use of such systems in manufacturing integrated circuits provided with field-effect transistors raises a technical problem that has to be resolved, namely, how to avoid the interface states (QSS) generated in the wafers when they reach the atmosphere while they still are at high temperature. To avoid these output interface states, it is possible to follow two different approaches.