Browse Prior Art Database

Wafer Pick-Up Tool

IP.com Disclosure Number: IPCOM000038938D
Original Publication Date: 1987-Mar-01
Included in the Prior Art Database: 2005-Feb-01

Publishing Venue

IBM

Related People

Authors:
Cook, LG Henry, WM Walsh, TJ [+details]

Abstract

A molded wafer pick-up tool has been designed which greatly reduces the need for operator dexterity required with conventional vacuum pencils. The tool uses the existing slots in the wafer boat to provide self-orientation prior to its picking up the wafer. The manual pick-up of semiconductor wafers from wafer carriers requires great dexterity on the part of the operator so as to not contact adjoining wafers with the pick-up tool, nor the wafer in transport. The new tool uses the wafer boat slots for controlled access which means the wafer is not touched until the tool is in place. This greatly reduces scratching and other damage which may occur to the wafer when vacuum pencils are used for pick-up.