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Pneumatic System for Clean Room Use

IP.com Disclosure Number: IPCOM000039027D
Original Publication Date: 1987-Apr-01
Included in the Prior Art Database: 2005-Feb-01

Publishing Venue

IBM

Related People

Authors:
Miller, RF [+details]

Abstract

This article describes a pneumatic system for clean room use which utilizes atmospheric pressure to drive the cylinder of an actuator. The requirement for the ability to operate linear actuators, such as pneumatic devices, has always created a potential of causing contam ination in a clean room due to the air pressure normally used to operate these devices. The system disclosed herein utilizes atmospheric pressure to drive the cylinder of an actuator. The drawing is a pneumatic circuit of the system. Two exhaust ports EA and EB of a single-solenoid, spring-return valve are connected to a vacuum source (i.e., a venturi vacuum pump). The venturi is exhausted to the floor of the clean room or to a manifold for removal of exhaust air.