Position-Sensitive Multianode Detector
Original Publication Date: 1987-Apr-01
Included in the Prior Art Database: 2005-Feb-01
Multianode detectors for detecting electrons, photons, or ions are commercially available, having a shielded or unshielded wire for each anode, where the wires are inside the vacuum. Besides having an inadequate number of channels and hence limited resolution, the high number of wires presents an outgassing problem which limits the achievable vacuum. The design of Figs. l and 2 allows the fabrication of l00 or more anodes, without the outgassing problem. The design (Fig. l) includes a re-entrant glass tube l0 which can protrude into the vacuum system sufficiently far to position the channel plates l2/multianode l4 assembly at the exit of an energy-dispersive analyzer. The base of the glass tube l0 has a glass-to-metal weld l6, and the metal base l8 is a conflat flange of standard size.