Ultrasonic Free-Standing Jet for Plating and Etching
Original Publication Date: 1987-Apr-01
Included in the Prior Art Database: 2005-Feb-01
High frequency ultrasound (MHz range) is used to produce local agitation at a cathode or anode (working electrode) interface in a chemical or electrochemical cell. The ultrasound is directed into a free-standing jet of electrolyte to produce enhanced maskless patterning. Generally, frequencies in excess of about l0 MHz are used in systems where the nozzle for the electrolyte jet is less than about 3 mm in diameter. In this system, an electrolyte storage container l0 is connected to a plating cell l2 via a tube l4 and circulation pump l6. An ultrasound power supply l8 is connected to the transducer 20 which emits an ultrasound beam 22 into the jet 24 of electrolyte which exits through nozzle 26. An anode 28 and cathode 30 complete the plating cell.