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Shielded Glass Slide Unit

IP.com Disclosure Number: IPCOM000039315D
Original Publication Date: 1987-May-01
Included in the Prior Art Database: 2005-Feb-01

Publishing Venue

IBM

Related People

Authors:
Busacco, RA [+details]

Abstract

In the vacuum deposition process of thin films it is often necessary to measure the thickness and composition of a particular layer. Glass slides or sample substrates are normally used for measurement purposes. When multiple layers of deposition are of similar composition and are adjacent to each other, it becomes difficult to successfully etch away the top layer without infringing on the desired layer to be measured. This problem is eliminated with the utilization of a glass slide holding device that retracts from the deposition field to act as a shield to prevent unwanted layers of deposition that are applied subsequent to thin film deposition. The shielded glass slide (SGS) unit comprises L-shaped bracket 10 with upper and horizontal slots 11 and 12.