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NONINTRUSIVE THERMOMETRY for TRANSPARENT THIN FILMS by LASER INTERFEROMETRIC MEASURMEMENT of THERMAL EXPANSION (Limotex) USING SINGLE or DUAL BEAMS

IP.com Disclosure Number: IPCOM000039473D
Original Publication Date: 1987-Jun-01
Included in the Prior Art Database: 2005-Feb-01

Publishing Venue

IBM

Related People

Authors:
Appleby-Hougham, G Robinson, B Saenger, KL Sun, CP [+details]

Abstract

This system measures the temperature of transparent thin films using laser interferometry to measure minute changes in film thickness resulting from thermal expansion. It can be used as either a direct (non- contact) or indirect (contact) temperature sensor. In the former case, the temperature of the thin film (a 5-50 mm layer, for example) is of primary interest. In the latter case, a thin film decal can be applied to the surface of an object whose temperature is to be measured. Alternatively, the thin film can be packaged as a capsule at the end of a protected optical fiber and then placed in contact with the object. (Image Omitted) film's back surface.