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High Current Pulsed E-Beam Source

IP.com Disclosure Number: IPCOM000039478D
Original Publication Date: 1987-Jun-01
Included in the Prior Art Database: 2005-Feb-01

Publishing Venue

IBM

Related People

Authors:
Chiu, GLT Halbout, J [+details]

Abstract

Electron beams are used for testing devices and have many advantages. No other technique can match the spatial resolution and depth of field obtainable with electron optics. Also, the collection of the secondary electrons emitted from the device under test is much easier than with other techniques. An electron source with greatly enhanced speed and electron current over existing guns (thermionic or field emission) is described that is useful for high-speed non-contact testing of devices. The key features of this gun are the use of ultrafast laser pulses to generate short electron pulses via photoemission or photon-assisted tunneling. These pulses can have photon energies above the work function of most simple metals.