Back Etch Metallization
Original Publication Date: 1987-Jun-01
Included in the Prior Art Database: 2005-Feb-01
The described method combines the lift-off technique with subtractive etching for forming a metallization pattern. On a substrate 1, selectively covered by an insulating layer 2, a photoresist mask 3, corresponding to the negative of the desired metallization pattern, is formed (Fig. 1). Metal 4 is blanket-deposited by evaporation, with the substrate temperatures being raised well over the softening point of the resist after the entire resist mask 3 has been covered with metal for good metal adhesion. Then, the structure is covered with a material 5, say, a photoresist, such that a planar surface is formed (Fig. 2). In the next step, material 5 is back etched until metal 4 on mask 3 is exposed.