Probe-To-Product Alignment Technique and Gauge
Original Publication Date: 1987-Jul-01
Included in the Prior Art Database: 2005-Feb-01
An alignment tool has been proposed to improve the precision alignment required between the probe of a multilevel ceramic (MLC) electrical tester and the substrate of a semiconductor device. The tool consists of two precision glass masters, probe gauge block, and borescope. Referring to the drawing, the measurement technique requires that the probe 1 of the probe assembly 12 be accurately aligned with the product or gauge precision alignment master 6 and the X, Y, r, and 180o rotation stage 8 so as to assure proper mechanical contact during the electrical test. A support casting 4 is sandwiched between two precision glass masters 2 to make up one assembly which is attached to an equipment precision reference point. The precision alignment master 6 or substrate is clamped in the product-holding device 7.