Coarse/Fine Approach Mechanism
Original Publication Date: 1987-Jul-01
Included in the Prior Art Database: 2005-Feb-01
In the microscope art, in particular in connection with scanning tunneling microscopes, vacuum-compatible mechanisms for performing coarse- and fine-approach operations at high stability and precision are required. The mechanism described below permits the linear translation of an object by means of a rotary drive which acts on an arrangement of differential springs. Supported on a rigid plate 1 is a stack of copper rings 2 with intermediate elastic cushions 3 for the attenuation of ambient vibrations. On top of the stack rests a supporting plate 4 to which a frame 5 is secured. Bottom plate 6 of frame 5 may, for example, carry the tip 7 of a scanning tunneling microscope. Guided inside frame 5 is a first cage 8 having rims 9 on which a plurality of cup springs 10 rest with their outer peripheries.