Browse Prior Art Database

Small Translation Stage Controlled Spray Mechanism

IP.com Disclosure Number: IPCOM000039892D
Original Publication Date: 1987-Aug-01
Included in the Prior Art Database: 2005-Feb-01

Publishing Venue

IBM

Related People

Authors:
Gibney, JT Kin, CC MacKinnon, DA Spero, RJ [+details]

Abstract

Disclosed is a method and system, using programmable controls, for fabrication of metal masks used in semiconductor device manufacture. Control of the nozzle-directed spray of the wet chemical etchant works to provide a much desired uniform pattern on the etched mask. Referring to the figure, the system consists of two nozzle panels 1 located parallel to the target mask 2. The nozzles are spaced a distance "A" in the "X" direction and "B" in the "Y" direction. A programmable translation mechanism 3 provides the necessary movement to the panels and/or the target so that the desired spray pattern is achieved. The programmable spray pattern provides for a wide variety of patterns and choice determined by maximum uniformity.