Browse Prior Art Database

Inspection Laser Scan Normalizer

IP.com Disclosure Number: IPCOM000039931D
Original Publication Date: 1987-Aug-01
Included in the Prior Art Database: 2005-Feb-01

Publishing Venue

IBM

Related People

Authors:
Forslund, DC LoDato, VA Schmidt, GE Thorp, LD [+details]

Abstract

It is proposed to use a comparator with inspection lasers to sense the photomultiplier output on blank portions of the green sheet used in the manufacture of multilayer ceramic (MLC) semiconductors. This standard data would then be used to normalize the photomultiplier's output on printed portions of the green sheet. (Image Omitted) There is a problem in obtaining normalized inspection laser scan data for use on MLC green sheet inspections. Because of the optical geometries and materials variations, scan data is not identical from scan to scan or throughout a particular scan. In the typical system a laser 1 (Fig. 1), or lasers, directs its beam as dual input beams 2 to a multifaceted rotating mirror 3 which reflects to a mirror 4 which directs the beam to the product green sheet 5.